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Wednesday, October 12, 2011

Rudolph receives first orders for 450 mm defect inspection and thin film metrology systems

FLANDERS, USA: Rudolph Technologies Inc., a leading provider of process characterization equipment and software for the semiconductor, solar and LED industries, has received the first orders for its leading-edge defect inspection and latest generation thin film metrology tools capable of supporting integrated circuit manufacturing on 450 mm silicon wafers. The multiple systems ordered, scheduled

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